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Start Over Descriptor "Tetrahedra -- Research" Journal journal of applied physics
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1. Photoelectron emission and Raman scattering studies of nitrogenated tetrahedral amorphous carbon films

Author

Shi, J.R., Wang, J.P., Wee, A.T.S., Yeo, C.B., Cheng, C.T. ;, Ueda, M., Tomioka, S., and Ohsako, J.

Subjects
Tetrahedra -- Properties, Tetrahedra -- Research, Photoelectron spectroscopy -- Usage, Photoelectron spectroscopy -- Research, Raman effect -- Research, Physics
Abstract

A study was conducted, using x-ray photoelectron spectroscopy (XPS), Raman spectroscopy, spectroscopic elipsometry, ultraviolet photoelectron spectroscopy and temperature dependent resistance measurement, to examine the nitrogenated tetrahedral amorphous carbon (N:ta-C) films prepared by the filtered cathodic vacuum arc (FCVA) technique. The result shows that the nitrogen content in the deposited film increases from 0 to 4.6 at. %, as the nitrogen flow rate varies from 0 to 20 sccm.

Published
2002

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