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Yttrium iron garnet films were deposited on Si and Si/CeO2 substrates by magnetron sputtering method followed by postannealing. By varying the fabrication parameters such as sputtering atmosphere, sputtering power, and annealing atmosphere, single phase garnet films were obtained with different off-stoichiometry and film density. The dependence of cation ratio, magnetic and magneto-optical characteristics, and absorption coefficient were systemically investigated. The results reveal that a proper oxygen pressure in both sputtering and annealing process give rise to a small cation ratio of (Fe2+ or Fe4+)/Fe3+, thus is beneficial to obtain large saturation magnetization, large Faraday rotation, and small optical absorption. The sputtering power can also affect the properties of the film through changing the film density. Our results indicate that the properties of sputtering deposited yttrium iron garnet (YIG) film can be easily tuned and optimized by modifying the off-stoichiometry and density of the film, thus provides flexibility to fabricate YIG film for extensive applications. [ABSTRACT FROM AUTHOR]

The Ba[Fe.sub.12][O.sub.19] ferrite and BaTi[O.sub.3] ceramic nanoparticles are prepared by sol-gel method and the sintering properties and interfacial diffusion of cofired system are analyzed. The cofiring property of Ba[Fe.sub.12][O.sub.19] and BaTi[O.sub.3] is modified by adjusting the composition of the slurry and a crack-free multilayer structure is obtained, thus proving that the cofiring system can be used for the fabrication of broadband and high frequency of chip electronic components.

Yttrium iron garnet films are grown by radio frequency magnetron sputtering on Si(111) substrate with and without Ce[O.sub.2] buffer layer and the effect of Ce[O.sub.2] buffer on the microstructure and magnetic behaviors of the films are examined. The film on Ce[O.sub.2] buffer layer has fine microstructure and its surface roughness is smaller than the unbuffered films, which has provided an increased exchange between the crystal grains and an enhanced spontaneous magnetization effect, leading to the higher remnant magnetization.

The magnetic properties of the yttrium iron garnet films that deposited and annealed at different atmospheres are examined. The results have shown that the magnetic properties of yttrium iron garnet films prepared by rf magnetron sputtering method is tuned with oxygen partial pressure in sputtering and annealing processes.