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In this study, we propose a mass production-able and low-cost method to fabricate the anodes of Li-ion battery. Carbonaceous anodes, integrated with thin amorphous silicon layers by plasma enhanced chemical vapor deposition, can improve the performance of specific capacity and coulombic efficiency for Li-ion battery. Three different thicknesses of a-Si layers (320, 640, and 960 nm), less than 0.1 wt% of anode electrode, were deposited on carbonaceous electrodes at low temperature 200◦C. Around 30 mg of a-Si by plasma enhanced chemical vapor deposition (PECVD) can improve the specific capacity ~42%, and keep coulombic efficiency of the half Li-ion cells higher than 85% after first cycle charge-discharge test. For the thirty cyclic performance and rate capability, capacitance retention can maintain above 96%. The thicker a-Si layers on carbon anodes, the better electrochemical performance of anodes with silicon-carbon composites we get. The traditional carbonaceous electrodes can be deposited a-Si layers easily by plasma enhanced chemical vapor deposition, which is a method with high potential for industrialization. [ABSTRACT FROM AUTHOR]