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Titanium targets with a bias voltage ranging from −500 to +500 V were submitted to multipulse high repetition rate Nd:yttrium aluminum garnet (YAG; λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiations in nitrogen at intensity values below the single-pulse melting threshold. The morphology of the TiN structures formed under the cumulative action of the laser pulses on the surface of the unbiased and biased targets was investigated by profilometry and scanning electron microscopy. Under these irradiation conditions, a specific columnar surface microrelief developed. The height of the microcolumns reached about 10–15 μm, and their diameter about 1–2 μm. The development of TiN microcolumns was enhanced by the applied bias voltage. The enhancement in the negative biased samples was stronger than that in the positive biased ones.

We report the growth of titanium nitride microcolumns under multipulse Nd:yttrium aluminum garnet (λ = 1.064 μm, τ ∼ 300 ns, ν = 30 kHz) laser irradiation of titanium targets in nitrogen atmosphere. The laser intensity value was chosen below the single-pulse melting threshold of titanium. The evolution with the number of laser pulses of the target morphology, crystalline state, and chemical composition at the surface as well as in depth were investigated by scanning electron microscopy, x-ray diffractometry, Raman spectroscopy, and wavelength dispersive x-ray spectroscopy. Under the action of the laser pulses, during progressive surface nitridation, an initial rippled morphology developed, which evolved with further irradiation to TiN microcolumns. In-depth investigations showed a granular zone beneath the surface consisting of rutile and anatase phase TiO2, followed by a compact needlelike layer of titanium until the interface with the unaffected target material.