Author: "Kazazis, Dimitrios" / Journal: journal of micro/nanolithography, mems, and moems - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Kazazis, Dimitrios"' showing total 7 results

Start Over Author "Kazazis, Dimitrios" Journal journal of micro/nanolithography, mems, and moems

7 results on '"Kazazis, Dimitrios"'

1. Quantitative characterization of absorber and phase defects on EUV reticles using coherent diffraction imaging

Author: Mochi, Iacopo, primary, Fernandez, Sara, additional, Nebling, Ricarda, additional, Locans, Uldis, additional, Rajeev, Rajendran, additional, Dejkameh, Atoosa, additional, Kazazis, Dimitrios, additional, Tseng, Li-Ting, additional, Danylyuk, Serhiy, additional, Juschkin, Larissa, additional, and Ekinci, Yasin, additional
Published: 2020
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2. Comparative study of extreme ultraviolet absorber materials using lensless actinic imaging

Author: Fernandez, Sara, primary, Kazazis, Dimitrios, additional, Rajendran, Rajeev, additional, Mochi, Iacopo, additional, Helfenstein, Patrick, additional, Yoshitake, Shusuke, additional, and Ekinci, Yasin, additional
Published: 2019
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3. Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

Author: Mochi, Iacopo, primary, Timmermans, Marina Y., additional, Gallagher, Emily E., additional, Mariano, Marina, additional, Pollentier, Ivan, additional, Rajendran, Rajeev, additional, Helfenstein, Patrick, additional, Fernandez, Sara, additional, Kazazis, Dimitrios, additional, and Ekinci, Yasin, additional
Published: 2019
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4. Mechanistic insights in Zr- and Hf-based molecular hybrid EUV photoresists

Author: Wu, Lianjia, primary, Baljozovic, Milos, additional, Portale, Giuseppe, additional, Kazazis, Dimitrios, additional, Vockenhuber, Michaela, additional, Jung, Thomas, additional, Ekinci, Yasin, additional, and Castellanos, Sonia, additional
Published: 2019
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5. Studying resist performance for contact holes printing using EUV interference lithography

Author: Wang, Xiaolong, primary, Tseng, Li-Ting, additional, Kazazis, Dimitrios, additional, Tasdemir, Zuhal, additional, Vockenhuber, Michaela, additional, Mochi, Iacopo, additional, and Ekinci, Yasin, additional
Published: 2019
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6. Extreme ultraviolet patterning of tin-oxo cages

Author: Haitjema, Jarich, primary, Zhang, Yu, primary, Vockenhuber, Michaela, primary, Kazazis, Dimitrios, primary, Ekinci, Yasin, primary, and Brouwer, Albert M., primary
Published: 2017
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7. RESCAN: an actinic lensless microscope for defect inspection of EUV reticles

Author: Mochi, Iacopo, primary, Helfenstein, Patrick, additional, Mohacsi, Istvan, additional, Rajeev, Rajendran, additional, Kazazis, Dimitrios, additional, Yoshitake, Shusuke, additional, and Ekinci, Yasin, additional
Published: 2017
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