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Carbon nanotube (CNT) arrays have been synthesized by a repeated growth method using a custom-fabricated plasma-enhanced thermal chemical vapor deposition (PE-thermal CVD) apparatus. The initial catalyst is a layered structure prepared by depositing 10 nm of Al followed by 3 nm of Fe on an oxidized silicon substrate. Following CNT growth, the CNT arrays are removed using an ultrasonic cleaner, and another CNT array is grown on the remaining Fe-Al bimetalic nanoparticles without the addition of more catalyst. Annealing the catalytic substrate in air between growth cycles results in the removal of residual amorphous carbon along with the CNTs, and oxidation of the Fe-Al nanoparticles. The diameter of CNTs is reduced with repeated growth-annealing cycles, an effect of which is attributed to the diminishing size of the catalytically active nanoparticles with each cycle. After two growth cycles, SWNTs with the extraordinarily narrow diameter of 0.86 nm are synthesized. TheID/IGratio derived from the Raman spectrum of these of the SWNT arrays shows the remarkably low value of 0.22.

We have synthesized Pd-filled carbon nanotubes (CNTs) oriented perpendicular to Si substrates using a microwave plasma-enhanced chemical vapor deposition (MPECVD) for the application of scanning probe microscopy (SPM) tip. Prior to the CVD growth, Al thin film (10 nm) was coated on the substrate as a buffer layer followed by depositing a5∼40 nm-thick Pd film as a catalyst. The diameter and areal density of CNTs grown depend largely on the initial Pd thickness. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) images clearly show that Pd is successfully encapsulated into the CNTs, probably leading to higher conductivity. Using optimum growth conditions, Pd-filled CNTs are successfully grown on the apex of the conventional SPM cantilever.