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The deuterium (D) permeation behaviors for ion-damaged tungsten (W) by 3 keV D-2 (+) and 10 keV C+ were studied. The D permeability was obtained for un-damaged W at various temperatures. For both D-2 (+) and C+ implanted W, the permeability was clearly reduced. But, for the D-2 (+) implanted W, the permeability was recovered by heating at 1173 K and it was almost consistent with that for un-damaged W. In the case of C+ implanted , the permeability was not recovered even if the sample was heated at 1173 K, indicating that the existence of carbon would prevent the recovery of permeation path in W. In addition, transmission electron microscope (TEM) observation showed the voids were grown by heating at 1173 K and not removed, showing the existence of damages would not largely influence on the hydrogen permeation behavior in W in the present study.