1. Reduction of coating induced polarization aberrations by controlling the polarization state variation
- Author
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Zhenrong Zheng, Li Yanghui, Xiang Hao, Yueguang Zhang, Weidong Shen, and Xu Liu
- Subjects
Polarization rotator ,Materials science ,business.industry ,engineering.material ,Polarization (waves) ,Induced polarization ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Optics ,Optical coating ,Coating ,Optical transfer function ,Transmittance ,engineering ,business ,Lithography - Abstract
The mechanism of coating induced polarization state variation is analysed by the Jones matrix. Pauli spin matrices are used to establish the relationship between coating induced polarization state variation and polarization aberrations. To reduce coating induced polarization aberrations, we propose that δ = 0 and Ts = Tp at arbitrary incident angle should be appended as two additional optimization goals of optical coating design when the requirements of transmittance are met. Two typical anti-reflection (AR) coatings are designed and the polarization state variation induced by them is simulated. The MTF (modulation transfer function) calculated by polarization ray tracing is applied to evaluate the polarization aberrations of the practical lithography objective system with the two AR coatings. All the obtained results show that the coating induced polarization aberrations can be reduced by optimizing the angle dependent properties of the optical coating without additional optical elements.
- Published
- 2011