1. Vertical electro-absorption modulator design and its integration in a VCSEL
- Author
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Stephane Calvez, Krassimir Panajotov, Hugo Thienpont, Guilhem Almuneau, Alexandre Arnoult, Ludovic Marigo-Lombart, Équipe Photonique (LAAS-PHOTO), Laboratoire d'analyse et d'architecture des systèmes (LAAS), Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3), Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1), Université Fédérale Toulouse Midi-Pyrénées, Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM), Department of Applied Physics and Photonics [Brussels] (TONA), Vrije Universiteit Brussel (VUB), Applied Physics and Photonics, Faculty of Engineering, Brussels Photonics Team, Université Toulouse Capitole (UT Capitole), Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse), Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J), Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3), Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP), Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole), and Université de Toulouse (UT)
- Subjects
Materials science ,Acoustics and Ultrasonics ,Optical communication ,Physics::Optics ,02 engineering and technology ,VCSEL ,Vertical-cavity surface-emitting laser ,law.invention ,020210 optoelectronics & photonics ,law ,Electro-absorption modulator ,0202 electrical engineering, electronic engineering, information engineering ,Figure of merit ,QCSE ,Quantum well ,business.industry ,SURFACE-EMITTING LASERS ,PEROT REFLECTION MODULATORS ,QUANTUM-WELL STRUCTURES ,WAVE-GUIDE MODULATORS ,OPTICAL MODULATION ,CAVITY LASER ,THRESHOLD CHARACTERISTICS ,REFRACTIVE-INDEX ,GAAS ,OPTIMIZATION ,modulator ,electro-absorption ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Laser ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,CMOS ,Modulation ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Optoelectronics ,0210 nano-technology ,business - Abstract
International audience; Electro-absorption modulators, either embedded in CMOS technology or integrated with a semiconductor laser, are of high interest for many applications such as optical communications, signal processing and 3D imaging. Recently, the integration of a surface-normal electro-absorption modulator into a vertical-cavity surface-emitting laser has been considered. In this paper we implement a simple quantum well electro-absorption model and design and optimize an asymmetric Fabry–Pérot semiconductor modulator while considering all physical properties within figures of merit. We also extend this model to account for the impact of temperature on the different parameters involved in the calculation of the absorption, such as refractive indices and exciton transition broadening. Two types of vertical modulator structures have been fabricated and experimentally characterized by reflectivity and photocurrent measurements demonstrating a very good agreement with our model. Finally, preliminary results of an electro-absorption modulator vertically integrated with a vertical-cavity surface-emitting laser device are presented, showing good modulation performances required for high speed communications.
- Published
- 2018
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