1. Characterization, optimization and surface physics aspects ofin situplasma mirror cleaning
- Author
-
Vincent Carlino, Carlos Perez Sempere, Michel Langlois, Jose Fernandez Rodriguez, I. Šics, Juan Reyes-Herrera, Juan Josep Lopez Alcolea, and Eric Pellegrin
- Subjects
Nuclear and High Energy Physics ,Surface science ,Radiation ,Plasma cleaning ,business.industry ,Environmental remediation ,Plasma ,Contamination ,Synchrotron ,law.invention ,Characterization (materials science) ,Optics ,Beamline ,law ,business ,Process engineering ,Instrumentation - Abstract
Although the graphitic carbon contamination of synchrotron beamline optics has been an obvious problem for several decades, the basic mechanisms underlying the contamination process as well as the cleaning/remediation strategies are not understood and the corresponding cleaning procedures are still under development. In this study an analysis of remediation strategies all based on in situ low-pressure RF plasma cleaning approaches is reported, including a quantitative determination of the optimum process parameters and their influence on the chemistry as well as the morphology of optical test surfaces. It appears that optimum results are obtained for a specific pressure range as well as for specific combinations of the plasma feedstock gases, the latter depending on the chemical aspects of the optical surfaces to be cleaned.
- Published
- 2014