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Start Over Author "Da-Jiang Liu" Publication Type Academic Journals Journal journal of the american chemical society

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1. Passive and Active Oxidation of Si(100) by Atomic Oxygen: A Theoretical Study of Possible Reaction Mechanisms.

Author

Cheol Ho Choi, Da-Jiang Liu, Evans, J.W., and Gordon, Mark S.

Subjects
*SILICON, *REACTION mechanisms (Chemistry), *OXIDATION, *OXYGEN, *QUANTUM theory
Abstract

Studies the reaction mechanisms for oxidation of the silicon (100) surface by atomic oxygen with high-level quantum mechanical methods. Use of quantum mechanics and molecular mechanics method; Initial surface products for oxygen adsorption; Ground state of the separated reactions, oxygen and silicon; Two channels for silicon oxide desorption.

Published
2002
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