1. High Reliable and Manufacturable Gallium Indium Zinc Oxide Thin-Film Transistors Using the Double Layers as an Active Layer
- Author
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Ihun Song, Jae Chul Park, Sunil Kim, Chang Jung Kim, Youngsoo Park, and Jin-Seong Park
- Subjects
Materials science ,Renewable Energy, Sustainability and the Environment ,Subthreshold conduction ,business.industry ,Electrical engineering ,chemistry.chemical_element ,Condensed Matter Physics ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,Active layer ,Amorphous solid ,Threshold voltage ,chemistry ,Thin-film transistor ,Materials Chemistry ,Electrochemistry ,Optoelectronics ,Surface layer ,Gallium ,business ,Layer (electronics) - Abstract
High reliable bottom gate amorphous gallium indium zinc oxide (a-GIZO) thin-film transistors (TFTs) have been fabricated by using the double active layers. Top and bottom layers were CuGaInZnO (CGIZO) and GIZO, respectively. When the plasma-enhanced processes were introduced during fabrication of the TFTs, the TFT with a-GIZO single active layer did not exhibit electrically reliable performance due to forming the conducting surface layer from the plasma damages. The double-active-layer TFT with a CGIZO layer had the reliable performance (μ FE of 5.1 cm 2 /V s, V th of 3.25 V, subthreshold gate swing value of 0.68 V/decade, I off of 3.8 X 10 -12 A) even under the same processes. This suggested that the Cu atom of CGIZO layer suppressed the carrier concentration during plasma-enhanced processes. The TFTs with double active layer showed excellent stability, which has the threshold voltage shift of
- Published
- 2009