Author: "Sarrott, F. -A." / Journal: journal of vacuum science & technology: part a-vacuums, surfaces & films - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Sarrott, F. -A." Journal journal of vacuum science & technology: part a-vacuums, surfaces & films

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1. Surface hydrogen content and passivation of silicon deposited by plasma induced chemical vapor deposition from silane and the implications for the reaction mechanism.

Author: Veprˇek, S., Sarrott, F. -A., Rambert, S., and Taglauer, E.
Published: 1989
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