1. Electrical properties and deep traps in ZnO films grown by molecular beam epitaxy.
- Author
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Polyakov, A. Y., Smirnov, N. B., Belogorokhov, A. I., Govorkov, A. V., Kozhukhova, E. A., Osinsky, A. V., Xie, J. Q., Hertog, B., and Pearton, S. J.
- Subjects
THIN films ,MOLECULAR beam epitaxy ,ELECTRIC potential ,SPECTRUM analysis ,REFLECTANCE - Abstract
Capacitance-voltage (C-V), capacitance-frequency (C-f), admittance spectroscopy, deep trap spectra, and far infrared reflectance measurements were performed on undoped and N-doped ZnO films deposited on sapphire by molecular beam epitaxy. The results show existence of a heavily doped n
+ layer near the interface with the substrate. The presence of these layers explains the large difference between the electron concentrations measured in the films by Hall effect and C-V profiling or calculated from the plasma minimum frequency in reflectance. C-V data obtained at low temperatures show a prominent persistent photocapacitance in the films. Admittance spectra were dominated by electron traps with ionization level EC -0.3 eV commonly observed in ZnO crystals grown by all techniques. [ABSTRACT FROM AUTHOR]- Published
- 2007
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