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As one of the significant structural materials used in safe and arming system of MEMS fuze, the research on micro-electroforming process technologies and micro-electroforming nickel's properties have been a popular field for MEMS area. This paper surveys present domestic and overseas research status of mechanical characterization of electroformed nickel, summarizes and analyzes that changes of the microstructure led by parameters of micro-electroforming process and the external environment make great effects. © (2015) Trans Tech Publications, Switzerland.

MEMS nickel material is commonly used for structural material in micro devices. In order to study the effect of environmental temperature on its mechanical properties,this paper has built up a experimental system which can measure the temperature-related static mechanical parameters of the UV-LIGA nickel material. By using the system for uniaxial tensile experiments of the micro specimen under different temperature, the stress-strain curves of the micro specimen under different temperature were obtained; the mechanical parameters of the micro specimen such as elastic modulus, yield stress and failure stress under different temperature were also calculated out;Finally, the relationship between temperature and mechanical parameters including elastic modulus, yield stress and failure stress was analyzed.

For the existing symmetry Z-tooth MEMS delay mechanisms can not play sports in place under the influence of centrifugal force, this paper presents an asymmetric Z-tooth delay mechanism which can works reliably by weak environmental forces. Working principle and the stress condition of the mechanism are analyzed. Based on the dynamic model, this paper makes a computational analysis and simulation about the kinetic characteristics of the asymmetric Z-tooth delay mechanism, and the results show that the improved mechanism can works reliably and meets the requirements.