Author: "Shih-Chiang Lin" / Journal: lithography asia 2008 - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Shih-Chiang Lin"' showing total 3 results

Start Over Author "Shih-Chiang Lin" Journal lithography asia 2008

3 results on '"Shih-Chiang Lin"'

1. Spacer double patterning technique for sub-40nm DRAM manufacturing process development

Author: Shiu, Weicheng, primary, Ma, William, additional, Lee, Hong Wen, additional, Wu, Jan Shiun, additional, Tseng, Yi Min, additional, Tsai, Kevin, additional, Liao, Chun Te, additional, Wang, Aaron, additional, Yau, Alan, additional, Lin, Yi Ren, additional, Chen, Yu Lung, additional, Wang, Troy, additional, Wu, Wen Bin, additional, and Shih, Chiang Lin, additional
Published: 2008
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2. Advance overlay correction beyond 32nm DRAM process

Author: Hung, Chia Tsung, primary, Hsia, Chung Ping, additional, Cheng, Tzu Shen, additional, Huang, Chun Yen, additional, Wu, Wen Bin, additional, and Shih, Chiang Lin, additional
Published: 2008
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3. Developing loading effect on lithography I-line process

Author: Huang, Thomas, primary, Wang, Walter, additional, Huang, Chun-Yen, additional, Tseng, Nick, additional, Guo, Ting-Jhen, additional, Shih, Chiang-Lin, additional, and Wu, Wen-Bin, additional
Published: 2008
Full Text: View/download PDF

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