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Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group—TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group—TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group—TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N). [ABSTRACT FROM AUTHOR]

The transition metal oxynitrides are a coating material with decorative features due to their adjustable color and good mechanical properties. The purpose of the research was to study the effect of the relative oxygen concentration O2(x) = O2/(N2 + O2) in particular on adhesion, but also on the color, structural and mechanical properties of ZrON coatings synthesized by cathodic arc evaporation on HS6-5-2 steel substrates. The surface morphology, phase and chemical composition and mechanical properties were determined using scanning electron microscopy, X-ray diffraction, wavelength dispersive X-ray spectroscopy, nanoindentation and scratch test. It was found that color of the coatings changed from light yellow for ZrN first to gold and then to graphite for Zr-O phase with increase of oxygen concentration. X-ray diffraction patterns showed that the phase separation of ZrN and ZrO2 occurred for about 35 at.% of oxygen in the coating. Increase in oxygen concentration in the coatings led to decrease in crystallite size from about 20 nm for ZrN to about 5 nm for coatings with about 35 at.% of oxygen and about 25 at.% of nitrogen. An increase in hardness from about 26 GPa for ZrN to about 30 GPa for coating with small concentration of oxygen (about 9 at.%) and then decrease to about 15 GPa was observed. Adhesion of Zr-O-N coatings demonstrated strong dependence on oxygen concentration. Critical load for ZrN is about 80 N and decreases with oxygen concentration increase to about 30 N for ZrO2. [ABSTRACT FROM AUTHOR]

Tools and machine surfaces are subjected to various types of damage caused by many different factors. Due to this, the protecting coatings characterized by the best properties for a given treatment or environment are used. AlCrN coatings with different compositions, synthesized by different methods, are often of interest to scientists. The aim of the presented work was the deposition and investigation of two sets of coatings: (1) formed in nitrogen pressure from 0.8 Pa to 5 Pa and (2) formed at arc current from 50 A to 100 A. We study relationships between the above technological parameters and discuss their properties. Coatings formed at nitrogen pressure (pN2) up to 3 Pa crystallize both in hexagonal AlN structure and the cubic CrN structure. For pN2 > 3 Pa, they crystallize in the CrN cubic structure. Crystallite size increases with nitrogen pressure. The coatings formed at different arc currents have a cubic CrN structure and the crystallite size is independent of the current. The adhesion of the coatings is very good, independent of nitrogen pressure and arc current. [ABSTRACT FROM AUTHOR]