1. Fully Ion Implanted Normally-Off GaN DMOSFETs with ALD-Al2O3 Gate Dielectrics.
- Author
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Yoshino, Michitaka, Ando, Yuto, Deki, Manato, Toyabe, Toru, Kuriyama, Kazuo, Honda, Yoshio, Nishimura, Tomoaki, Amano, Hiroshi, Kachi, Tetsu, and Nakamura, Tohru
- Subjects
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DIELECTRICS , *METAL oxide semiconductor field-effect transistors , *ION implantation , *FIELD-effect transistors , *SILICON - Abstract
A normally-off GaN double-implanted vertical MOSFET (DMOSFET) with an atomic layer deposition (ALD)-Al2O3 gate dielectric film on a free-standing GaN substrate fabricated by triple ion implantation is presented. The DMOSFET was formed with Si ion implanted source regions in a Mg ion implanted p-type base with N ion implanted termination regions. A maximum drain current of 115 mA/mm, maximum transconductance of 19 mS/mm at a drain voltage of 15 V, and a threshold voltage of 3.6 V were obtained for the fabricated DMOSFET with a gate length of 0.4 μm with an estimated p-type base Mg surface concentration of 5 × 1018 cm−3. The difference between calculated and measured Vths could be due to the activation ratio of ion-implanted Mg as well as Fermi level pinning and the interface state density. On-resistance of 9.3 mΩ·cm2 estimated from the linear region was also attained. Blocking voltage at off-state was 213 V. The fully ion implanted GaN DMOSFET is a promising candidate for future high-voltage and high-power applications. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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