1. Deposition of ZnO thin film on polytetrafluoroethylene substrate by the magnetron sputtering method
- Author
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Yu-zhen Yuan, Gong-xiang Wei, Shishen Yan, Xu-tuan Gao, Xin-zhong Cao, and Yun-yan Liu
- Subjects
Polytetrafluoroethylene ,Materials science ,Dielectric strength ,business.industry ,Scanning electron microscope ,Mechanical Engineering ,Analytical chemistry ,Substrate (electronics) ,Sputter deposition ,Condensed Matter Physics ,chemistry.chemical_compound ,chemistry ,Mechanics of Materials ,Electrical resistivity and conductivity ,Microelectronics ,Optoelectronics ,General Materials Science ,Thin film ,business - Abstract
Due to the excellent optical and electrical properties, ZnO thin films deposited on flexible substrates can be used as technologically promising electron devices. Polytetrafluoroethylene (Teflon) had many advanced properties, such as high dielectric strength over various frequencies, low dissipation factor, and high surface electrical resistivity, which had made Teflon a competitive polymer choice in a variety of microelectronic applications. In our work, ZnO film was firstly deposited on Teflon substrate by the magnetron sputtering method. X-ray diffraction data revealed that the ZnO grains were highly c -axis-oriented and nanostructured with the size of 10–30 nm, which was in accordance with the experimental result of Scanning Electron Microscopy.
- Published
- 2007