11 results on '"Messina G."'
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2. A single quality factor for electron backscattering from thin films
3. The role of electron scattering in x-ray reflection masks
4. Tungsten/carbon masks in x-ray projection lithography
5. Electron scattering of low-Z high-density materials in X-ray mask patterning
6. Short-range and long-range scattering in electron beam lithography
7. Electron scattering of diamond membranes in x-ray mask fabrication
8. The generalized backscattering coefficient: A novel parameter in electron scattering processes
9. Electron scattering effects in additive patterning of XRL masks for 0.2 micron resolution
10. Simulation of 64 megabit lithography in XRL masks obtained by single-layer process on Si substrates
11. X-ray mask making by EBL and Monte Carlo analysis of a single-resist layer process on low-z membrane
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