1. A Microtester for Measuring the Reliability of Microdevices in Controlled Environmental Conditions
- Author
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Aijun Yang, Yong Zhang, Weitao Dou, Xinyi Wang, Chenyuan Zhou, Yunjia Li, and Dayong Qiao
- Subjects
Materials science ,020209 energy ,Mechanical Engineering ,Small footprint ,reliability test ,microtester ,Humidity ,temperature and humidity control ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Energy harvester ,Automotive engineering ,Article ,decoupling control ,Electromagnetic vibration ,Reliability (semiconductor) ,Control and Systems Engineering ,TJ1-1570 ,0202 electrical engineering, electronic engineering, information engineering ,Standard test ,Mechanical engineering and machinery ,Shaker ,Electrical and Electronic Engineering ,0210 nano-technology ,Decoupling (electronics) - Abstract
A miniaturized reliability test system for microdevices with controlled environmental parameters is presented. The system is capable of measuring key electrical parameters of the microdevices while controlling the environmental conditions around the microdevices. The test system is compact and thus can be integrated with standard test equipment for microdevices. By using a feed-forward decoupling algorithm, the presented test system is capable of generating a temperature range of 0–120 °C and a humidity range of 20–90% RH (0–55 °C), within a small footprint and weight. The accuracy for temperature and humidity control is ±0.1 °C and ±1% RH (30 °C), respectively. The functionality of the proposed test system is verified by integrating it with a piezo shaker to test the environmental reliability of an electromagnetic vibration energy harvester. The proposed system can be used as a proof-of-technology platform for characterizing the performance of microdevices with controlled environmental parameters.
- Published
- 2021