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In this study, the electrical characteristics and electrical coupling effect for monolithic 3-dimensional nonvolatile memory consisting of a feedback field-effect transistor (M3D-NVM-FBFET) were investigated using technology computer-aided design. The M3D-NVM-FBFET consists of an N-type FBFET with an oxide–nitride–oxide layer and a metal–oxide–semiconductor FET (MOSFET) in the top and bottom tiers, respectively. For the memory simulation, the programming and erasing voltages were applied at 18 and −18 V for 1 μs, respectively. The memory window of the M3D-NVM-FBFET was 1.98 V. As the retention simulation was conducted for 10 years, the memory window decreased from 1.98 to 0.83 V. For the M3D-NVM-FBFET, the electrical coupling that occurs through an electrical signal in the bottom-tier transistor was investigated. As the thickness of the interlayer dielectric (TILD) decreases from 100 to 10 nm, the change in the VTH increases from 0.16 to 0.87 V and from 0.15 to 0.84 V after the programming and erasing operations, respectively. M3D-NVM-FBFET circuits with a thin TILD of 50 nm or less need to be designed considering electrical coupling. [ABSTRACT FROM AUTHOR]

In this study, the electrical characteristics and electrical coupling effect for monolithic 3-dimensional nonvolatile memory consisting of a feedback field-effect transistor (M3D-NVM-FBFET) were investigated using technology computer-aided design. The M3D-NVM-FBFET consists of an N-type FBFET with an oxide–nitride–oxide layer and a metal–oxide–semiconductor FET (MOSFET) in the top and bottom tiers, respectively. For the memory simulation, the programming and erasing voltages were applied at 18 and −18 V for 1 μs, respectively. The memory window of the M3D-NVM-FBFET was 1.98 V. As the retention simulation was conducted for 10 years, the memory window decreased from 1.98 to 0.83 V. For the M3D-NVM-FBFET, the electrical coupling that occurs through an electrical signal in the bottom-tier transistor was investigated. As the thickness of the interlayer dielectric (TILD) decreases from 100 to 10 nm, the change in the VTH increases from 0.16 to 0.87 V and from 0.15 to 0.84 V after the programming and erasing operations, respectively. M3D-NVM-FBFET circuits with a thin TILD of 50 nm or less need to be designed considering electrical coupling.

A monolithic three-dimensional integrated static random access memory containing a feedback field effect transistor (M3D-FBFET-SRAM) was proposed. The M3D-FBFET-SRAM cell consists of one metal oxide semiconductor field effect transistor (MOSFET) and one FBFET, and each transistor is located on the top tier and one on the bottom tier in a monolithic 3D integration, respectively. The electrical characteristics and operation of the NFBFET in the M3D-FBFET-SRAM cell were investigated using a TCAD simulator. For SRAM operation, the optimum doping profile of the NFBFET was used for non-turn-off characteristics. For the M3D-FBFET-SRAM cell, the operation of the SRAM and electrical coupling occurring between the top and bottom tier transistor were investigated. As the thickness of interlayer dielectric decreases, the reading 'ON' current decreases. To prevent performance degradation, two ways to compensate for current level were suggested. [ABSTRACT FROM AUTHOR]

The effect of the work-function variation (WFV) of metal-oxide-semiconductor field-effect transistor (MOSFET) gates on a monolithic 3D inverter (M3DINV) structure is investigated in the current paper. The M3DINV has a structure in which MOSFETs are sequentially stacked. The WFV effect of the top- and bottom-tier gates on the M3DINV is investigated using technology computer-aided design (TCAD) and a Monte-Carlo sampling simulation of TCAD. When the interlayer dielectric thickness (TILD) changes from 5 to 100 nm, electrical parameters, such as the threshold voltage, subthreshold swing, on-current, and off-current of the top-tier N-MOSFET and the parameter changes by the change in gate voltage of the bottom-tier P-MOSFET, are investigated. As TILD decreases below about 30 nm, the means and standard deviations of the electrical parameters rapidly increase. This means that the coupling and its distribution are relatively large in the regime and thus should be well considered for M3D circuit simulation. In addition, due to the increase in standard deviation, the WFV effect of both the top- and bottom-tier MOSFET gates was observed to be greater than those of only the top-tier MOSFET gates and only the bottom-tier MOSFET gates. [ABSTRACT FROM AUTHOR]

A monolithic three-dimensional integrated static random access memory containing a feedback field effect transistor (M3D-FBFET-SRAM) was proposed. The M3D-FBFET-SRAM cell consists of one metal oxide semiconductor field effect transistor (MOSFET) and one FBFET, and each transistor is located on the top tier and one on the bottom tier in a monolithic 3D integration, respectively. The electrical characteristics and operation of the NFBFET in the M3D-FBFET-SRAM cell were investigated using a TCAD simulator. For SRAM operation, the optimum doping profile of the NFBFET was used for non-turn-off characteristics. For the M3D-FBFET-SRAM cell, the operation of the SRAM and electrical coupling occurring between the top and bottom tier transistor were investigated. As the thickness of interlayer dielectric decreases, the reading ‘ON’ current decreases. To prevent performance degradation, two ways to compensate for current level were suggested.

The effect of the work-function variation (WFV) of metal-oxide-semiconductor field-effect transistor (MOSFET) gates on a monolithic 3D inverter (M3DINV) structure is investigated in the current paper. The M3DINV has a structure in which MOSFETs are sequentially stacked. The WFV effect of the top- and bottom-tier gates on the M3DINV is investigated using technology computer-aided design (TCAD) and a Monte-Carlo sampling simulation of TCAD. When the interlayer dielectric thickness (TILD) changes from 5 to 100 nm, electrical parameters, such as the threshold voltage, subthreshold swing, on-current, and off-current of the top-tier N-MOSFET and the parameter changes by the change in gate voltage of the bottom-tier P-MOSFET, are investigated. As TILD decreases below about 30 nm, the means and standard deviations of the electrical parameters rapidly increase. This means that the coupling and its distribution are relatively large in the regime and thus should be well considered for M3D circuit simulation. In addition, due to the increase in standard deviation, the WFV effect of both the top- and bottom-tier MOSFET gates was observed to be greater than those of only the top-tier MOSFET gates and only the bottom-tier MOSFET gates.

The junctionless field-effect transistor (JLFET) compact model using the model parameters extracted from the LETI-UTSOI (version 2.1) model was proposed to perform circuit simulation considering the electrical coupling between the stacked JLFETs of a monolithic 3D integrated circuit (M3DIC) composed of JLFETs (M3DIC-JLFET). We validated the model by extracting the model parameters and comparing the simulation results of the technology computer-aided design and the Synopsys HSPICE circuit simulator. The performance of the M3DIC-JLFET was compared with that of the M3DIC composed of MOSFETs (M3DIC-MOSFET). The performance of a fan-out-3 ring oscillator with M3DIC-JLFET varied by less than 3% compared to that with M3DIC-MOSFET. The performances of ring oscillators of M3DIC-JLFET and M3DIC-MOSFET were almost the same. We simulated the performances of M3DICs such as an inverter, a NAND, a NOR, a 2 × 1 multiplexer, and a D flip-flop. The overall performance of the M3DIC-MOSFET was slightly better than that of the M3DIC-JLFET.

In order to simulate a circuit by applying various logic circuits and full chip using the HSPICE model, which can consider electrical coupling proposed in the previous research, it is investigated whether additional electrical coupling other than electrical coupling by top and bottom layer exists. Additional electrical coupling were verified through device simulation and confirmed to be blocked by heavily doped source/drain. Comparing the HSPICE circuit simulation results using the newly proposed monolithic 3D NAND (M3DNAND) structure in the technology computer-aided design (TCAD) mixed-mode and monolithic 3D inverter (M3DINV) unit cell model was once more verified. It is possible to simulate various logic circuits using the previously proposed M3DINV unit cell model. We simulated the operation and performances of M3DNAND, M3DNOR, 2 × 1 multiplexer (MUX), D flip-flop (D-FF), and static random access memry (SRAM).

The junctionless field-effect transistor (JLFET) compact model using the model parameters extracted from the LETI-UTSOI (version 2.1) model was proposed to perform circuit simulation considering the electrical coupling between the stacked JLFETs of a monolithic 3D integrated circuit (M3DIC) composed of JLFETs (M3DIC-JLFET). We validated the model by extracting the model parameters and comparing the simulation results of the technology computer-aided design and the Synopsys HSPICE circuit simulator. The performance of the M3DIC-JLFET was compared with that of the M3DIC composed of MOSFETs (M3DIC-MOSFET). The performance of a fan-out-3 ring oscillator with M3DIC-JLFET varied by less than 3% compared to that with M3DIC-MOSFET. The performances of ring oscillators of M3DIC-JLFET and M3DIC-MOSFET were almost the same. We simulated the performances of M3DICs such as an inverter, a NAND, a NOR, a 2 × 1 multiplexer, and a D flip-flop. The overall performance of the M3DIC-MOSFET was slightly better than that of the M3DIC-JLFET.

In order to simulate a circuit by applying various logic circuits and full chip using the HSPICE model, which can consider electrical coupling proposed in the previous research, it is investigated whether additional electrical coupling other than electrical coupling by top and bottom layer exists. Additional electrical coupling were verified through device simulation and confirmed to be blocked by heavily doped source/drain. Comparing the HSPICE circuit simulation results using the newly proposed monolithic 3D NAND (M3DNAND) structure in the technology computer-aided design (TCAD) mixed-mode and monolithic 3D inverter (M3DINV) unit cell model was once more verified. It is possible to simulate various logic circuits using the previously proposed M3DINV unit cell model. We simulated the operation and performances of M3DNAND, M3DNOR, 2 × 1 multiplexer (MUX), D flip-flop (D-FF), and static random access memry (SRAM). [ABSTRACT FROM AUTHOR]