1. A fast and efficient method for permittivity measurement of thin‐film material.
- Author
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Qiu, Tiancheng, Han, Kangkang, Wei, Gao, and Lei, Siyuan
- Subjects
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PERMITTIVITY measurement , *DIELECTRIC materials , *MATERIALS testing , *PERMITTIVITY , *DIELECTRICS , *TEST methods - Abstract
A fast and efficient method is proposed in this letter to characterize the dielectric permittivity of thin‐film materials. The measuring system is based on a TE103 rectangular split‐cavity resonator operating at around 10 GHz, which has the advantage of providing nondestructive measurements while maintaining a high level of accuracy. The thin‐film materials under test can be directly inserted in the split without being processed in a specific shape. Different dielectric materials are tested using this method. And the theoretical derivations and experimental measurements have been performed to confirm the validity and effectiveness of this approach. [ABSTRACT FROM AUTHOR]
- Published
- 2023
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