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In this paper, we report on polyethylene (PE) film modified by atmospheric dielectric barrier discharge (DBD) plasma prior to the deposition of SiOx coating to improve its barrier properties. Three kinds of monomers: allylamine, acrylic acid, and ethanol, are used to modify the PE surface. For comparison, Ar and O2 plasma pre-treatments are also performed. It is found that with the addition of a monomer in the Ar DBD plasma, the grafted active groups on PE surfaces lead to dense, pinhole-free growth of the SiOx film. The oxygen transmission rate (OTR) decreases from 700 cc/m2·day·atm. for the pristine to ca. 70 cc/m2·day·atm. for the pretreatment-coated PE, which is more than a 10-fold reduction. The relationship between the grafted monomer and the great decrease of OTR is then explored via chemical composition by attenuated total reflection Fourier transform infrared spectroscopy (ATR-FTIR) and via morphology observation by atomic force microscopy (AFM) and scanning electron microscopy (SEM). The results show that the grafted functional groups of -NH2, -COOH and -OH increase the surface energy and promote the nucleation of Si–O radicals on polymeric surfaces, and the formation of network and cage structures in SiOx film contributes to the significant improvement of OTR. [ABSTRACT FROM AUTHOR]