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The InGaN ternary system, which is useful for blue and green light emitting or laser diodes, is studied with respect to an unstable mixing region in the phase field. The unstable region is analyzed using a strictly regular solution model. The interaction parameter used in the analysis is obtained from a strain energy calculation using the valence force field model, modified for both wurtzite and zinc-blende structures to avoid overestimation of the strain energy. The structural deviation from an ideal wurtzite structure in GaN and InN is also taken into account in our model. The interaction parameters of InGaN obtained by our analysis for the wurtzite and zinc-blende structures are 7.81 kcal/mol and 6.63 kcal/mol, respectively. According to the calculated results of the interaction parameters, the critical temperature for wurtzite InGaN and zinc-blende InGaN are found to be 1967 K and 1668 K, respectively. This suggests that, at a typical growth temperature of 800°C, a wide unstable mixing region exists in both wurtzite and zinc-blende structures. In order to show the validity of our calculation results, we compare the calculated results and the experimental results using the calculation of the interaction parameter for the InGaAs system. The calculated results agree well with the experimental results.

Thermodynamic calculations were carried out on chloride transport vapor phase epitaxy of GaN using GaCl3/N2 and NH3/N2. At typical growth temperature and gas flow rates, both GaN formation and gas phase etching reactions of GaN are thermodynamically favored. Under thermodynamic equilibrium, most ammonia should decompose to nitrogen and hydrogen gases and gas phase etching of GaN occurs by HCl. From experimental measurements, less than 10% of the incoming ammonia decomposes and under this condition, GaN formation from GaCl3/N2 and NH3/N2 is thermodynamically favored. Higher V/III ratios give a larger driving force for GaN fromation. These calculations match our experimental results. Experimentally, we have optimized the growth conditions of GaN. High crystalline quality thick GaN films (10 ~ l5µm) were grown on c-Al2O3. The GaN films show band edge emission dominated PL at both room temperature and 77 K. Only one set of diffraction peaks from % MathType!MTEF!2!1!+- % feaagKart1ev2aaatCvAUfeBSjuyZL2yd9gzLbvyNv2CaerbuLwBLn % hiov2DGi1BTfMBaeXatLxBI9gBaerbd9wDYLwzYbItLDharqqr1ngB % PrgifHhDYfgasaacH8srps0lbbf9q8WrFfeuY-Hhbbf9v8qqaqFr0x % c9pk0xbba9q8WqFfea0-yr0RYxir-Jbba9q8aq0-yq-He9q8qqQ8fr % Fve9Fve9Ff0dmeaabaqaciGacaGaaeqabaWaaeaaeaaakeaadaqada % qaaiaaigdacaaIWaGabGymayaaraGaaGOmaaGaayjkaiaawMcaaaaa % !3C38! $$\left( {10\bar 12} \right)$$ planes with 60° spacing in the ϕ-scan of X-ray diffraction are observed. This indicates that the GaN films grown on c-Al2O3 are single crystalline. Typical growth rates were about 10 ~ l5µm/hr and typical Hall mobility values of GaN films were in the range of 3 to 40 cm2/Vsec.