1. Broad-band anti-reflective pore-like sub-wavelength surface nanostructures on sapphire for optical windows
- Author
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Jiecai Han, Gui-Gen Wang, Ji-Li Tian, Zheng Liu, Dong-Dong Zhao, Li-Yan Wang, Zhao-Qing Lin, School of Materials Science & Engineering, and Centre for Programmable Materials
- Subjects
Nanostructure ,Materials science ,Sapphire ,Annealing (metallurgy) ,Bioengineering ,02 engineering and technology ,Epitaxy ,01 natural sciences ,010309 optics ,0103 physical sciences ,Transmittance ,General Materials Science ,Electrical and Electronic Engineering ,Thin film ,Materials [Engineering] ,business.industry ,Mechanical Engineering ,General Chemistry ,Sputter deposition ,021001 nanoscience & nanotechnology ,Microstructure ,Mechanics of Materials ,Optoelectronics ,0210 nano-technology ,business ,Sub-wavelength Structure - Abstract
Compared with conventional anti-reflective film, an anti-reflective sub-wavelength surface structure provides an ideal choice for a sapphire optical window especially in harsh environments. However, it is still a challenge to obtain a sapphire anti-reflective surface microstructure because of its high hardness and chemical inertness. In this paper, combined with optical simulation, we proposed a facile method based on the anodic oxidation of aluminum film and following epitaxial annealing. Al thin film was deposited on a sapphire substrate by magnetron sputtering, and anodic oxidation was then performed to prepare surface pore-like structures on the Al film. Followed by two-step annealing, both the anodic oxidized coating and underlying unoxidized Al film were transformed totally into alumina. The parameters of anodic oxidation were analyzed to obtain the optimal pore-like structures for the antireflection in the mid-infrared and visible spectrum regions, respectively. Finally, the optimized surface sub-wavelength nanostructure on sapphire can increase the transmittance by 7% in the wavelength range of 3000–5000 nm and can increase 13.2% significantly for visible spectrum region, respectively. Meanwhile, the surface wettability can be also manipulated effectively. The preparation of surface pore-like sub-wavelength structure by the annealing of anodic oxidized aluminum film on sapphire is a feasible, economical and convenient approach and can find the applications for various optoelectronic fields.
- Published
- 2018