1. A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform
- Author
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Mikhail Churaev, Rui Ning Wang, Annina Riedhauser, Viacheslav Snigirev, Terence Blésin, Charles Möhl, Miles H. Anderson, Anat Siddharth, Youri Popoff, Ute Drechsler, Daniele Caimi, Simon Hönl, Johann Riemensberger, Junqiu Liu, Paul Seidler, and Tobias J. Kippenberg
- Subjects
Science - Abstract
Abstract The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices. Yet to date, LiNbO3 photonic integrated circuits have mostly been fabricated using non-standard etching techniques and partially etched waveguides, that lack the reproducibility achieved in silicon photonics. Widespread application of thin-film LiNbO3 requires a reliable solution with precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO3 photonic platform employing wafer-scale bonding of thin-film LiNbO3 to silicon nitride (Si3N4) photonic integrated circuits. The platform maintains the low propagation loss (
- Published
- 2023
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