1. In situ optical monitoring of Fabry-Perot multilayer structures: analysis of current techniques and optimized procedures
- Author
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Catherine Grèzes-Besset, Mael Vignaux, Julien Lumeau, Fabien Lemarchand, RCMO (RCMO), Institut FRESNEL (FRESNEL), Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)-École Centrale de Marseille (ECM)-Centre National de la Recherche Scientifique (CNRS), Compagnie industrielle des lasers (CILAS), and Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Marseille (ECM)-Aix Marseille Université (AMU)
- Subjects
010302 applied physics ,Computer science ,business.industry ,Physics::Optics ,Band-stop filter ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,010309 optics ,Wavelength ,Optics ,Band-pass filter ,Filter (video) ,0103 physical sciences ,Electronic engineering ,[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic ,Current (fluid) ,business ,Refractive index ,Fabry–Pérot interferometer ,Monitoring procedure - Abstract
International audience; Single cavity Fabry-Perot filters are one of the most popular designs for the production of narrow bandpass filters. The usual deposition strategy to create such filters based on optical monitoring at the filter central wavelength is well-known and has proven its strength over decades. We review in this paper the possible optical methods to monitor such a filter during production and analyze their strengths and weaknesses. Then, we discuss a new monitoring procedure, mixing different methods, to minimize the production errors of this filter while maintaining a precise filter centering. This strategy is applied on different bandpass filter designs.
- Published
- 2017
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