1. Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive
- Author
-
Yoshihiro Taguchi and Masaaki Hashimoto
- Subjects
Materials science ,business.industry ,Small footprint ,Microscanner ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,law.invention ,Power (physics) ,010309 optics ,Lens (optics) ,Optics ,Multiphoton fluorescence microscope ,law ,0103 physical sciences ,Millimeter ,0210 nano-technology ,business ,Joule heating ,Pyramid (geometry) - Abstract
This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner with a millimeter-range low-power lens drive for endoscopic biomedical applications. A variation of Japanese origami art, kirigami involves creation of out-of-plane structures by paper cutting and folding. The proposed microscanner is composed of freestanding kirigami film on which the spiral-curved thermal bimorphs are strategically placed. The kirigami microscanner is electrothermally transformed into an out-of-plane circular multistep pyramid by Joule heating. The circular pyramidal kirigami microscanner on a small footprint of 4.5 mm × 4.5 mm was fabricated by microelectromechanical system processes. A large four-step pyramidal actuation was successfully demonstrated, and a large 1.1-mm lens travel range at only 128 mW was achieved.
- Published
- 2020