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In this paper, based on the spatially and temporally resolved intensity and phase evaluation device: full information from a single hologram (STRIPED FISH), an improved single-frame full spatiotemporal field distribution measurement method is proposed. In our scheme, between diffractive optical element (DOE) and band-pass filter (BPF), and between BPF and the CCD camera, digital micromirror devices (DMD) are introduced to perfect the setup. Compared with the STRIPED FISH, our improved scheme can simultaneously improve the frame rate and maximize the utilization efficiency of the SBP of CCD. And simulation is carried out to demonstrate the process of the implementation, which confirmed the feasibility of the proposal. [ABSTRACT FROM AUTHOR]

Abstract: Maskless lithography (ML) provides a fast and low-cost method for projecting the images of IC or micro features onto photoresist. However, it needs an efficient simulation method to evaluate the performance of lithography process. In this paper, a pixel-based partially coherent image method for digital micro-mirror device (DMD) based ML is proposed based on the linear invariant theory. In our method, the mask is sampled by DMD pixel (each pixel corresponding to each micro-mirror) and expressed by rect function. Using the shift theory of Fourier transform and the stacked pupil operator approach, we build a matrix Φ for system response function of rect function. If the DMD pixel state matrix is S, then the aerial image can be calculated with two matrix multiplication I(x,y)= SΦ. [Copyright &y& Elsevier]