1. Synthesis of zirconium guanidinate complexes and the formation of zirconium carbonitride via low pressure CVD
- Author
-
Christopher S. Blackman, SE Stephen Potts, Hywel O. Davies, David Pugh, Claire J. Carmalt, and F Abou-Chabine
- Subjects
Zirconium ,Abrasion (mechanical) ,Organic Chemistry ,Metallurgy ,chemistry.chemical_element ,Chemical vapor deposition ,Inorganic Chemistry ,Metal ,Crystallography ,chemistry ,visual_art ,Chlorine ,visual_art.visual_art_medium ,Adhesive ,Physical and Theoretical Chemistry ,Thin film ,Carbon - Abstract
Thin films of zirconium carbonitride have been deposited on glass at 600 °C from two novel guanidinate precursors: [ZrCp′{η2-(iPrN)2CNMe2}2Cl] (1) and [ZrCp′2{η2-(iPrN)2CNMe2}Cl] (2) (Cp′ = monomethylcyclopentadienyl). Both compounds 1 and 2 were structurally characterized by X-ray crystallography. The films grown via low pressure chemical vapor deposition (LPCVD) from compound 1 were mirror-like with a red-brown sheen whereas those from 2 were gray. Chlorine was present in the films although the levels were no higher than 3 at.%. These two compounds clearly show how the coordination environment around the metal center affects the composition of the film, as films from 1 were nitrogen rich and those from 2 were carbon rich. The films were uniform, adhesive, abrasion resistant, conformal, and hard, being resistant to scratching with steel and brass scalpels.
- Published
- 2009