1. Structural and electrical properties of semipolar (11-22) AlGaN grown on m-plane (1-100) sapphire substrates.
- Author
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Jo, Masafumi, Oshima, Issei, Matsumoto, Takuma, Maeda, Noritoshi, Kamata, Norihiko, and Hirayama, Hideki
- Subjects
ALUMINUM nitride ,GALLIUM nitride ,SAPPHIRES ,SUBSTRATES (Materials science) ,ELECTRIC properties - Abstract
Semipolar III-nitrides have attracted increasing attention because of the reduced piezoelectric field in the active layer. In particular, (11-22) plane is promising due to the small polarization field along the growth axis and the epitaxial matching on m-plane sapphire. The aim of this study was to assess the effect of growth conditions on the structural and electrical properties of Si-doped (11-22) AlGaN. Semipolar AlGaN/AlN layers were grown on m-plane sapphire by metal-organic chemical vapor deposition at different temperatures, V/III ratios, and tetraethylesilane flows. Surface morphology, crystalline quality, and electrical properties of the AlGaN layers were investigated with AFM, XRD, and by Hall measurements, respectively. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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