1. Low-cost high-quality crystalline germanium based flexible devices.
- Author
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Nassar, Joanna M., Hussain, Aftab M., Rojas, Jhonathan P., and Hussain, Muhammad M.
- Subjects
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COMPLEMENTARY metal oxide semiconductors , *METAL oxide semiconductor capacitors , *METAL-insulator-semiconductor capacitors , *PHYSICAL vapor deposition , *ELECTRONICS - Abstract
High performance flexible electronics promise innovative future technology for various interactive applications for the pursuit of low-cost, light-weight, and multi-functional devices. Thus, here we show a complementary metal oxide semiconductor (CMOS) compatible fabrication of flexible metal-oxide-semiconductor capacitors (MOSCAPs) with high-κ/metal gate stack, using a physical vapor deposition (PVD) cost-effective technique to obtain a high-quality Ge channel. We report outstanding bending radius ∼1.25 mm and semi-transparency of 30%. (© 2014 WILEY-VCH Verlag GmbH &Co. KGaA, Weinheim) [ABSTRACT FROM AUTHOR]
- Published
- 2014
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