1. Bias Temperature Instability of Normally‐Off GaN MIS‐FET with Low‐Pressure Chemical Vapor Deposition SiNx Gate Dielectric.
- Author
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Hua, Mengyuan, Qian, Qingkai, Wei, Jin, Zhang, Zhaofu, Tang, Gaofei, and Chen, Kevin J.
- Subjects
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GALLIUM nitride , *METAL oxide semiconductor field-effect transistors , *LOW pressure (Science) , *CHEMICAL vapor deposition , *SILICON nitride - Abstract
In this work, characterizations are conducted to investigate the threshold voltage (VTH) stability of the normally‐off GaN metal–insulator–semiconductor (MIS‐) field‐effect transistor (FET) with fully recessed gate structure and highly reliable low‐pressure chemical vapor deposition SiNx gate dielectric. We conducted bias‐temperature instability (BTI) tests under both positive and negative gate bias. We demonstrated the highly stable VTH of the high‐performance MIS‐FETs with small BTI, which benefits from the effective interfacial protection layer. More specifically, combining the BTI tests and drain current 1/f noise analysis, we present extensive investigation of the physical origins of BTI. According to the experimental evidence and analysis, we ascribe the VTH instability to the trapping/detrapping of the pre‐existing trap states located at the SiNx/GaN interface and/or in the gate dielectric. [ABSTRACT FROM AUTHOR]
- Published
- 2018
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