1. Structure of hydrogenated amorphous silicon-carbon alloys as investigated by extended x-ray-absorption fine structure
- Author
-
Florestano Evangelisti, Settimio Mobilio, Federico Boscherini, S Pascarelli, Pascarelli, S, Boscherini, F, Mobilio, Settimio, Evangelisti, Florestano, and Evangelisti, F.
- Subjects
Amorphous silicon ,chemistry.chemical_classification ,Materials science ,Extended X-ray absorption fine structure ,Alloy ,engineering.material ,Amorphous solid ,Bond length ,Crystallography ,chemistry.chemical_compound ,chemistry ,Amorphous carbon ,K-edge ,engineering ,Inorganic compound - Abstract
We have studied the local structure of hydrogenated amorphous silicon-carbon alloy films, a-${\mathrm{Si}}_{1\mathrm{\ensuremath{-}}\mathit{x}}$${\mathrm{C}}_{\mathit{x}}$:H, by measuring the extended x-ray-absorption fine structure at the Si K edge. We find that first-coordination-shell average bond lengths are 2.35 A\r{} for Si-Si and 1.86 A\r{} for Si-C and are constant with concentration to within \ifmmode\pm\else\textpm\fi{}0.015 A\r{}. By comparing the composition of the first coordination shell around Si with the average concentration, we show that the alloy tends to be chemically ordered, in that heteroatomic bonds are preferred.
- Published
- 1992