6 results on '"Kim, Jaejeong"'
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2. Stencil mask fabrication for cell projection e-beam lithography with silicon wafer.
3. Analysis of resist pattern collapse and optimization of DUV process for patterning sub-0.20-m gate line.
4. Substrate effects of silicon nitride on i-line and deep-UV lithography.
5. Formation of TiN films by metal organic chemical vapor deposition using TDEAT.
6. Influence of shape of the illumination aperture on the intrafield image displacement.
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