21 results on '"Lang, Robert A."'
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2. Highly etch-selective spin-on bottom antireflective coating for use in 193-nm lithography and beyond.
3. Impact of thin resist processes on post-etch LER.
4. Current developments of a high-performance CA resist for mask-making application.
5. Extending the performance of KRS-XE for high-throughput electron-beam lithography for advanced mask making.
6. Applicaton of blends and side chain Si-O copolymers as high-etch-resistant sub-100-nm e-beam resists.
7. Enhancement of KRS-XE for 50 keV Advanced Mask Making Applications.
8. High-performance e-beam resist coupling excellent dry etch resistance and sub-100-nm resolution for advanced mask and device making.
9. High-performance e-beam resist coupling excellent dry etch resistance and sub-100-nm resolution for advanced mask making.
10. Minimally invasive scoliosis treatment with a Ho:YAG laser.
11. HanaFlex: a large solar array for space applications
12. High-brightness flared lasers.
13. Advances in high-power fiber-coupled laser diodes.
14. Monolithically integrated high-speed high-power diffraction-limited semiconductor sources for space telecommunications.
15. Performance/area tradeoffs in tree-based VLSI architectures for the two-dimensional wavelet transform.
16. High-power coherent phased array of monolithic flared amplifier-master oscillator power amplifiers (MFA-MOPAs).
17. Very large scale integration (VLSI) word size and precision analysis of the discrete wavelet transform.
18. 1.3-W cw diffraction-limited monolithically integrated master oscillator flared amplifier at 860 nm.
19. Applying wavelet analysis to speech segmentation and classification.
20. Efficient systolic architecture for the one-dimensional wavelet transform.
21. Optoelectronic master chip for optical computing
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