Author: "Tortai, J.-H." / Journal: proceedings of spie - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Tortai, J.-H."' showing total 5 results

Start Over Author "Tortai, J.-H." Journal proceedings of spie

5 results on '"Tortai, J.-H."'

1. Sensitivity analysis of optical scatterometry technique for high aspect ratio trench measurement

Author: Robinson, John C., Sendelbach, Matthew J., Grasland, J., Le Cunff, D., Pham, H. L., Besacier, M., and Tortai, J. H.
Published: 2023
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2. Ellipsometry studies of the kinetic of deprotection of thin 193 nm positive tone resist film.

Author: Ridaoui, H., Derrough, S., Sourd, C., Trouve, H., Pikon, A., and Tortai, J. H.
Published: 2008
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3. Overcoming pattern collapse on e-beam and EUV lithography.

Author: Jouve, A., Simon, J., Pikon, A., Solak, H., Vannuffel, C., and Tortai, J.-H.
Published: 2006
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4. Overcoming pattern collapse of ultra high resolution dense lines obtained with EUV resists.

Author: Jouve, A., Simon, J., Foucher, J., David, T., Tortai, J.-H., and Solak, Harun
Published: 2005
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5. Gaussian beam writing strategy: accuracy of using the shape beam simulator SELID for Gaussian beam systems.

Author: Tortai, J. H., Thiault, J., Tiron, R., Mollard, L., Haefele, Stephan, Vychub, Sergey, Lewellen, John, and Brooker, Peter
Published: 2005
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