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With the rapid development of interferometric synthetic aperture radar (InSAR) measurement technology, its measurement accuracy requirements are increasing. Atmospheric delay errors must be corrected, especially in the case of crustal deformation monitoring, the 20% variation of tropospheric water vapor among InSAR pairs generally produces range from 10 cm to 14 cm deformation errors. Such errors can be of the same magnitude as the annual changes in crustal deformation, or even greater, masking crustal deformation information and seriously affecting the results of crustal deformation monitoring. Therefore, in order to obtain a more accurate InSAR atmospheric delay correction model, this paper calculated and integrated atmospheric delays that were estimated by different sources, including the 37 pressure levels of the fifth generation of the European Centre for Medium-Range Weather Forecasts (ECMWF)) numerical weather prediction model, ECMWF Reanalysis v5 (ERA5), and Global Navigation Satellite System (GNSS) measurement data from the crustal movement observation network of China, based on the variance component estimation (VCE) weighting method. The results showed that the integrated model, based on the VCE method, is better than the generic atmospheric correction online service (GACOS) model for InSAR measuring of crustal deformation. The precision in monitoring crustal deformations was improved by approximately 5 mm, the correlation coefficient of atmospheric delay errors and crustal deformations improved from 0.287 to 0.347, and accuracy improved by approximately 25%. However, the improvement in accuracy was limited because of system error decoherence that was induced by atmospheric noise caused by abundant vegetation or snow cover. Therefore, in order to achieve more accurate results, we recommend the adoption of the multi-source integrated atmospheric delay correction model, based on the VCE method, for InSAR high-precision measuring of crustal deformation and seismic activities. [ABSTRACT FROM AUTHOR]