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A family of silicon(IV) compounds, where the Si centers of trimethylsilyl (–SiMe3) are linked with 2-alkyl-aminopyridine ligands, has been synthesized by reaction of the corresponding lithium salt of these ligands and SiMe3Cl in a general procedure. They were characterized by 1H NMR, 13C NMR, 29Si NMR, EI-MS and elemental analysis where necessary. Thereinto, 29Si NMR and the synthesis of 2-N,N-bis(trimethylsilyl)aminopyridine were achieved for the confirmation of their coordination structures. Significantly, the evaluation of these silicon compounds containing 2-aminopyridinates as CVD precursors was discussed for the first time. Thermal stability, transport behavior and vapour pressures were assessed by simultaneous thermal analyses (STA). Chemical vapor deposition was accomplished in a hot wall CVD reactor system to qualitatively demonstrate the ability of them as CVD precursors.

The title compounds of the type (Me3Si)2N–C(N′R)(–N′′RSiMe3) (with R = iPr or Cy) as potential CVD precursors have been synthesized and characterized by X-ray diffraction, 1H NMR, 13C NMR, 29Si NMR and elemental analysis where necessary. Among these characterizations, solid-/liquid-state 29Si NMR were accomplished to study their behavior in the solid and solution. Thermal properties including stability, volatility, transport behavior and vapour pressure were evaluated by thermogravimetric analysis (TGA) to confirm that they are suitable for the CVD procedure. Deposition was accomplished in a hot wall CVD reactor system, which preliminarily verified the ability of these compounds as CVD precursors.