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Spatial separation of activator oxides in MnO2 + PbO and MnO2 + V2O5 binary compositions helps to locate the interactions between the oxides that lead to nonlinear joint effects of the compositions on GaAs thermal oxidation. The mutual enhancement of the chemostimulating activity (a positive nonlinear effect) was discovered in the solid phase, whereas vapor-phase processes led to a considerable negative nonadditivity of the joint chemostimulating effect.

The contribution from the solid-phase interactions in the PbO + Sb2O3 and PbO + Bi2O3 activating compositions to the multichannel process of GaAs thermal oxidation has been determined by spatial separation of the oxides. The solid-phase interactions make a positive contribution to the overall negative nonlinear effect in the dependence of the oxide film thickness on the GaAs surface on the activator batch composition. The contributions from the oxide interactions on the semiconductor surface and in the gas phase have been evaluated for the PbO + Sb2O3 composition.

Spatial separation of the oxides in MnO2 + PbO and MnO2 + V2O5 binary compositions activating the thermal oxidation of GaAs has made it possible to locate the interactions between these oxides that are responsible for the nonlinear effects observed in their coaction. The solid-phase interactions enhance the chemostimulating activities of both oxides (a positive nonlinear effect takes place). The gas-phase interactions cause a marked negative deviation from the additive chemical stimulation effect.