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1. Giant Piezoelectricity on Si for Hyperactive MEMS

Author

Baek, S. H., Park, J., Kim, D. M., Aksyuk, V. A., Das, R. R., Bu, S. D., Felker, D. A., Lettieri, J., Vaithyanathan, V., Bharadwaja, S. S. N., Bassiri-Gharb, N., Chen, Y. B., Sun, H. P., Folkman, C. M., Jang, H. W., Kreft, D. J., Streiffer, S. K., Ramesh, R., Pan, X. Q., Trolier-McKinstry, S., Schlom, D. G., Rzchowski, M. S., Blick, R. H., and Eom, C. B.

Published
2011

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