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• The LTCC technology and MEMS was used to prepare a modular integrated EFI system. • The modular integrated EFI system has higher integration and smaller volume. • The research has realized the low voltage input and control of EFI system. • Characterization indicated that the system has higher energy utilization. In this study, the flyback high-voltage conversion unit, capacitor discharge unit, and EFI chip of the exploding foil initiator (EFI) system were highly integrated using low temperature cofired ceramic technology and MEMS, forming a modular integrated system with boost, discharge, and firing functions. The modular integrated EFI system used the design idea of system in a package, selected chip-level or planar components, eliminating the need for connecting wires and reducing the volume of the EFI system to 5.67 cm3. Compared with the traditional EFI system, while analysis from the characterization showed that the integrated structure reduced the loop inductance of the system to 27 nH, which was 55 % lesser, it accelerated the flyer to 3800 m/s, which was 15.2 % faster. These accomplishments indicated that the energy utilization rate of the integrated system was higher. The input voltage of the system was reduced from traditionally high voltage of 1250 V to lower voltage of 24 V due to the integrated-system boost function. Simultaneously, the 5 V MOS controlled thyristor (MCT) chip was selected to replace 1800 V∼2500 V spark gap switch as the working voltage, thus making 5 V the switching voltage of the system. These changes made high safety operation of the system. Moreover, the system had used modular design and manufacturing to improve its reliability and obtained the characteristics of mass production. [ABSTRACT FROM AUTHOR]