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Addition of a safety control function to the micro-igniter (MI) and improvement of its output energy are key steps required to realize attitude control, state maintenance, and orbit adjustment of micro-aerospace vehicles using a micro-thruster. To solve the system misaction caused by traditional MI due to false triggering, a microelectromechanical system (MEMS) safety device based on Lorentz force is proposed, which can operate reliably under the driving condition of 0.5 T/0.5 A, and increase the safety control function for the MI. In addition, with the aim of addressing the problem that energy attenuation and unreliable ignition of the micro-thrusters are caused by the gap between the MI and the fuel, this paper proposes a hybrid integration process for an energy amplification element (Al/Ni energetic film) and an MI (Ni-Cr) to form a Ni-Cr@Al/Ni energetic MI (EMI). By optimizing the modulation ratio (3:2) and modulation period (75 nm) of the energetic film, the preparation of the integrated EMI is completed. Electrical explosion performance analyses of the micro-igniter are performed. Under 50 V/33 μF capacitor discharge excitation, TheAl / Ni energetic film can increase the output energy of MI by 17.54 mJ. Through the non-contact (2 mm) ignition capability test, the EMI can reliably ignite 30 mg B/KNO 3. Compared with the traditional MI, EMI has the advantages of high output energy per unit space and has a function of non-contact ignition. The EMI has strong application prospects in the aerospace vehicle launch and attitude adjustment field. [Display omitted] • A MEMS safety device based on Lorentz force is proposed. • The safety device can effectively isolate the energy output of the micro-igniter. • The Al/Ni energetic film can increase the output energy of micro--igniter by 17.54 mJ. • Through the non-contact (2 mm) ignition capability test, the energetic-micro-igniter can reliably ignite 30 mg B/KNO 3. [ABSTRACT FROM AUTHOR]

• The LTCC technology and MEMS was used to prepare a modular integrated EFI system. • The modular integrated EFI system has higher integration and smaller volume. • The research has realized the low voltage input and control of EFI system. • Characterization indicated that the system has higher energy utilization. In this study, the flyback high-voltage conversion unit, capacitor discharge unit, and EFI chip of the exploding foil initiator (EFI) system were highly integrated using low temperature cofired ceramic technology and MEMS, forming a modular integrated system with boost, discharge, and firing functions. The modular integrated EFI system used the design idea of system in a package, selected chip-level or planar components, eliminating the need for connecting wires and reducing the volume of the EFI system to 5.67 cm3. Compared with the traditional EFI system, while analysis from the characterization showed that the integrated structure reduced the loop inductance of the system to 27 nH, which was 55 % lesser, it accelerated the flyer to 3800 m/s, which was 15.2 % faster. These accomplishments indicated that the energy utilization rate of the integrated system was higher. The input voltage of the system was reduced from traditionally high voltage of 1250 V to lower voltage of 24 V due to the integrated-system boost function. Simultaneously, the 5 V MOS controlled thyristor (MCT) chip was selected to replace 1800 V∼2500 V spark gap switch as the working voltage, thus making 5 V the switching voltage of the system. These changes made high safety operation of the system. Moreover, the system had used modular design and manufacturing to improve its reliability and obtained the characteristics of mass production. [ABSTRACT FROM AUTHOR]