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With the gradual maturity of the terrestrial laser scanners (TLS) technology, it is widely used in the field of deformation monitoring due to its fast, automated, and non-contact data acquisition capabilities. The TLS technology has changed the traditional deformation monitoring mode which relies on single-point monitoring. This paper analyzes the application of TLS in deformation monitoring, especially in the field of ground surface, dam, tunnel, and tall constructions. We divide the methods for obtaining ground surface deformation into two categories: the method based on point cloud distance and the method based on displacement field. The advantages and disadvantages of the four methods (M2M, C2C, C2M, M3C2) based on point cloud distance are analyzed and summarized. The deformation monitoring methods and precisions based on TLS for dams, tunnels, and tall constructions are summarized, as well as the various focuses of different monitoring objects. Additionally, their limitations and development directions in the corresponding fields are analyzed. The error sources of TLS point cloud data and error correction models are discussed. Finally, the limitations and future research directions of TLS in the field of deformation monitoring are presented in detail. [ABSTRACT FROM AUTHOR]