Author: "Makino E" / Journal: sensors and actuators a: physical - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Makino E"' showing total 8 results

Start Over Author "Makino E" Journal sensors and actuators a: physical

8 results on '"Makino E"'

1. Micromachining of diamond probes for atomic force microscopy applications

Author: Unno, K., Shibata, T., and Makino, E.
Published: 2001
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2. Fabrication of TiNi shape memory micropump

Author: Makino, E., Mitsuya, T., and Shibata, T.
Published: 2001
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3. Micromachining of TiNi shape memory thin film for fabrication of micropump

Author: Makino, E., Mitsuya, T., and Shibata, T.
Published: 2000
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4. Dynamic actuation properties of TiNi shape memory diaphragm

Author: Makino, E., Mitsuya, T., and Shibata, T.
Published: 2000
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5. Dynamic thermo-mechanical properties of evaporated TiNi shape memory thin film

Author: Makino, E., Shibata, T., and Kato, K.
Published: 1999
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6. Micromachining of fine ceramics by photolithography

Author: Makino, E., Shibata, T., and Yamada, Y.
Published: 1999
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7. Thermo-mechanical properties of TiNi shape memory thin film formed by flash evaporation

Author: Makino, E., Kato, K., and Shibata, T.
Published: 1999
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8. Flash evaporation of TiNi shape memory thin film for microactuators

Author: Makino, E., Uenoyama, M., and Shibata, T.
Published: 1998
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