Author: "Pohland, Maximilian" / Journal: solid state phenomena - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Pohland, Maximilian" Journal solid state phenomena

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1. Ozone Chemistry for BEOL Resist Stripping – A Systematic Analytical Attempt to Understand the Interaction of O3 with Modern DUV-Resists

Author: Guder, Mathias, primary, Pellowska, Maren, additional, Pohland, Maximilian, additional, Dalmer, Michael, additional, and Kolbesen, Bernd O., additional
Published: 2009
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