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Start Over Author "Beckx, Stephan" Journal solid state technology
1 results on '"Beckx, Stephan"'

1. Integrating high-k dielectrics: etched polysilicon or metal gates? (Etch)

Author

Schram, Tom, Beckx, Stephan, De Gendt, Stefan, Vertommen, Johan, and Lee, Steve

Subjects
United States
Abstract

OVERVIEW There is an immediate need for reduced gate leakage/higher capacitance gate stacks for stand-by low power applications. For high-performance applications, where leakage is less of a restraining factor, the […]

Published
2003

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