Search

Your search keyword '"Funke, Hans H."' showing total 2 results
Start Over Author "Funke, Hans H." Journal solid state technology
2 results on '"Funke, Hans H."'

1. Using tunable diode laser spectroscopy to detect trace moisture in ammonia

Author

Funke, Hans H., Yao, Jianlong, Raynor, Mark W., and Wright, Andrew O.

Subjects
Semiconductor lasers -- Usage, Fourier transform infrared spectroscopy -- Usage, Ammonia -- Discovery and exploration
Abstract

OVERVIEW Detection of moisture contamination in hydride gases, such as ammonia used for epitaxial growth, has become a significant concern for manufacturers of III-V compound semiconductors. The presence of moisture […]

Published
2004

2. Better process protection with automated gas monitoring/purification. (Contamination Control)

Author

Vestman, Lee E., Funke, Hans H., Raynor, Mark W., Lowell, Larry J., and Baril, David P.

Subjects
Analog Devices Inc. -- Production processes -- Equipment and supplies -- Management, Semiconductor industry -- Equipment and supplies -- Production processes, Business, Electronics and electrical industries, Semiconductor industry, Company business management, Company process management, Production processes, Management, Equipment and supplies
Abstract

OVER VIEW Many advanced wafer fabrication processes demand gases that are purer than those available from house gas sources or even high-purity cylinder gases, necessitating point-of-use reaction-bed gas purification. The [...]

Published
2002

Catalog

Books, media, physical & digital resources
See catalog results