1. Photosensitive properties of As-S layers
- Author
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Alexander V. Stronski, Sergey A. Kostyukevich, Miroslav Vlcek, and A. Sklenar
- Subjects
Diffraction ,Materials science ,Thin layers ,Analytical chemistry ,Physics::Optics ,Dielectric ,Diffraction efficiency ,Crystallography ,Chemical species ,symbols.namesake ,Transmittance ,symbols ,Raman spectroscopy ,Refractive index - Abstract
The present paper is concerned with investigations of photosensitive properties of As-S thin layers. Spectral dependence of the refraction index n of variously treated (virgin, exposed, annealed) samples was estimated from optical transmission in the spectral region 400 - 2500 nm. The n energy dependence of variously treated samples was fitted by the Wemple-DiDomenico dispersion relationship and used to estimate the single-oscillator model parameters. It was found, that exposure, as well as annealing leads to the increase in n values over the all investigated spectral region. Compositional dependencies of single-oscillator model parameter Ed (dispersion energy), optical dielectric constant e(0) show maximum at stoichiometric composition As40-S60 and, possibly, weak maximum at As28.6S71.4 composition. Composition evolution of the intensity of bands in Raman spectra corresponding to the As rich and S rich molecular fragments is in agreement with compositional changes of Ed and optical dielectric constant. Changes of the parameters of the single-oscillator model induced by treatment are discussed on the base of photo- and thermally-induced structural changes and are consistent with topological models and models that claim a degree of chemical ordering. Such photoinduced structural changes provide good etching selectivity of As-S layers in amine based solvents. Surface relief patterns that were fabricated have good surface quality. Diffraction efficiency values of holographic diffraction gratings obtained on the base of As100-XSX layers consisted 60 - 70%.© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
- Published
- 2003
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